![]() ![]() Yoon SW, Lee SW, Perkins NC, Najafi K (2007) Vibration sensitivity of MEMS tuning fork gyroscopes. Zaman MF, Sharma A, Ayazi F (2006) High performance matched-mode tuning fork gyroscope. Xie H, Fedder GK (2003) Integrated microelectromechanical gyroscopes. Walther A, Blanc CL, Delorme N, Deimerly Y, Anciant R, Willemin J (2013) Bias contributions in a MEMS tuning fork gyroscope. Trusov AA, Schofield AR, Shkel AM (2011) Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering. Trusov AA, Schofield AR, Shkel AM (2008) A substrate energy dissipation mechanism in in-phase and anti-phase micromachined z-axis vibratory gyroscopes. Singh TP, Sugano K, Tsuchiya T, Tabata O (2013) Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators. Singh TP, Sugano K, Tsuchiya T, Tabata O (2012) Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes. In: Proceedings position, location, and navigation symposium (PLANS), San Diego, pp 586–593 Shkel AM (2006) Type I and type II micromachined vibratory gyroscopes. In: Proceedings IEEE SENSORS Conference, Atlanta, pp 120–123 Schofield A, Trusov A, Shkel A (2007) Multi degree of freedom tuning fork gyroscope demonstrating shock rejection. Guan YW, Gao SQ, Liu HP, Niu SH (2014) Acceleration sensitivity of tuning fork gyroscopes: theoretical model, simulation and experimental verification. Proceedings Position, Location, and Navigation Symposium (PLANS), Monterey, pp 1–6 ![]() Geen J (2004) Progress in integrated gyroscopes. Therefore, the novel anchored coupling TFG can provide improved mode ordering and substantially suppress the vibration output without compromising the scale factor.Īlper SE, Akin T (2004) Symmetrical and decoupled nickel microgyroscope on insulating substrate. Our results demonstrate that the vibration output is reduced by 74.8 and 88.1 % in the anti-phase mode and in-phase mode, respectively. Additionally, we carry out the FEM simulations on the vibration sensitivity induced by the stiffness imbalance for the two types of TFGs. Meanwhile, the in-phase frequency of the anchored coupling TFG is 5,958.4 Hz, improving by 48.7 %, and the anti-phase frequency is increased a little. The simulated frequencies of the in-phase and anti-phase in the sense mode are 4,006.8 and 4,463.5 Hz, respectively. In order to make a contrast with the proposed novel anchored coupling TFG, a conventional one with a direct coupling ring spring between two tines is also designed. The proposed TFG prioritizes anti-phase drive-mode by using a levered mechanism while the sense-mode is prioritized utilizing an anchored coupling ring spring linked by four linear beams, which eliminates the lower frequency parasitic mode and provides true mechanical suppression of external vibration. In this paper, a novel MEMS tuning fork gyroscope with anchored coupling mechanism is designed to analyze the mode ordering and vibration sensitivity. ![]()
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